Silicon Run Lithography examines the role of photolithography in imaging and printing the many intricate layers of integrated circuits. Focusing on critical and non-critical mask levels of a CMOS transistor, this video takes a close look at the manufacturing materials, tools, and processes that have made more precise and complex submicron lithography possible. Silicon Run Lithography shows how mask patterns are greatly reduced and precisely positioned on silicon wafers using "step and repeat" and "step and scan" exposure processes.